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Journal description
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Details for article 22 of 44 found articles
| Title: |
Growth of AlN Films and Its Process Development for the Fabrication of Acoustic Devices and Micromachined Structures |
| Author: |
Kar, J. P. Bose, G. Tuli, S. Dangwal, A. Mukherjee, S. |
| Appeared in: |
Journal of materials engineering and performance |
| Paging: | Volume 18 () nr. 8 pages 1046-1051 |
| Year: |
2009-11-01 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 44 found articles
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