Relationship Between Crystalline Structure and Hardness of Ti-Si-N-O Coatings Fabricated by dc Sputtering
Titel:
Relationship Between Crystalline Structure and Hardness of Ti-Si-N-O Coatings Fabricated by dc Sputtering
Auteur:
García-González, Leandro Hernández-Torres, Julián Mendoza-Barrera, Claudia Meléndez-Lira, Miguel García-Ramírez, Pedro J. Martínez-Castillo, Jaime Sauceda, Ángel Herrera-May, Agustin L. Muñoz Saldaña, Juan Espinoza-Beltrán, Francisco J.