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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 8 of 20 found articles
| Title: |
Micro gears and turbines etched from silicon |
| Author: |
Mehregany, Gabriel, K.J. Trimmer, W.S.N. |
| Appeared in: |
Sensors and actuators |
| Paging: | Volume 12 (1987) nr. 4 pages 8 p. |
| Year: |
1987 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 20 found articles
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