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                                       Details for article 7 of 7 found articles
 
 
  Piezoresistive properties of polycrystalline and crystalline silicon films
 
 
Title: Piezoresistive properties of polycrystalline and crystalline silicon films
Author: Schubert, D.
Jenschke, W.
Uhlig, T.
Schmidt, F.M.
Appeared in: Sensors and actuators
Paging: Volume 11 (1987) nr. 2 pages 11 p.
Year: 1987
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 7 found articles
 
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