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Journal description
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Details for article 29 of 83 found articles
| Title: |
Formation of buried insulating layers in silicon by the implantation of high doses of oxygen |
| Author: |
Hemment, P.L.F. Maydell-Ondrusz, E. Stephens, K.G. Butcher, J. Ioannou, D. Alderman, J. |
| Appeared in: |
Nuclear instruments and methods in physics research |
| Paging: | Volume 209-210 (1983) nr. P1 pages 8 p. |
| Year: |
1983 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 83 found articles
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