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Journal description
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Details for article 229 of 779 found articles
| Title: |
Design considerations for the X-ray lithography station at the Stanford synchrotron radiation laboratory |
| Author: |
Pianetta, P. Tatchyn, R. Jaeger, R. Barbee Jr., T.W. |
| Appeared in: |
Nuclear instruments and methods in physics research |
| Paging: | Volume 222 (1984) nr. 1-2 pages 4 p. |
| Year: |
1984 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 229 of 779 found articles
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