|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 82 of 87 found articles
| Title: |
The effect of recoiled oxygen on damage regrowth and electrical properties of through-oxide implanted Si |
| Author: |
Sadana, D.K. Wu, N.R. Washburn, J. Current, M. Morgan, A. Reed, D. Maenpaa, M. |
| Appeared in: |
Nuclear instruments and methods in physics research |
| Paging: | Volume 209-210 (1983) nr. P2 pages 8 p. |
| Year: |
1983 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 82 of 87 found articles
| << previous | next >> |