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Journal description
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Details for article 7 of 58 found articles
| Title: |
Deposition and Characterization of 3-Aminopropyltrimethoxysilane Monolayer Diffusion Barrier for Copper Metallization |
| Author: |
Sharma, Sumit Kumar, Mukesh Rani, Sumita Kumar, Dinesh |
| Appeared in: |
Metallurgical and materials transactions. B, Process metallurgy and materials processing science |
| Paging: | Volume 46 (2014) nr. 2 pages 928-932 |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 58 found articles
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