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Journal description
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Details for article 4 of 24 found articles
| Title: |
Annealing and oxidation effects after CF4/H2 dry etching for damage recovery |
| Author: |
Ikawa, Eiji Endo, Nobuhiro Tajima, Masao Kurogi, Yukinori |
| Appeared in: |
Surface science letters |
| Paging: | Volume 172 (1986) nr. 3 pages nvt p. |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 24 found articles
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