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Journal description
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Details for article 17 of 55 found articles
| Title: |
Effect of Potassium Iodate-Based Slurry for Polishing of Ruthenium (Ru) as Advanced Interconnects |
| Author: |
Hazarika, Jenasree Talukdar, Anusuya Rajaraman, Prasanna Venkatesh |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 52 () nr. 10 pages 6551-6565 |
| Year: |
2023-07-20 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 17 of 55 found articles
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