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Effect of Thickness on Morphology, Structural, and Optical Properties of Nb-Doped β-Ga2O3 Films Prepared by RF Magnetron Sputtering |
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Titel: |
Effect of Thickness on Morphology, Structural, and Optical Properties of Nb-Doped β-Ga2O3 Films Prepared by RF Magnetron Sputtering |
Auteur: |
Li, Ruidong Deng, Jinxiang Xie, Peng Zhang, Qing Meng, Xue Luo, Juxin Wang, Guisheng Yang, Qianqian Gao, Hongli |
Verschenen in: |
Journal of electronic materials |
Paginering: |
Jaargang 52 () nr. 1 pagina's 251-257 |
Jaar: |
2022-10-20 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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