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Effects of Al Preflow on the Uniformity of an AlN Nucleation Layer and GaN Grown on Si (111) Substrate |
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Title: |
Effects of Al Preflow on the Uniformity of an AlN Nucleation Layer and GaN Grown on Si (111) Substrate |
Author: |
Ma, Jinbang Zhang, Yachao Yao, Yixin Zhang, Tao Li, Yifan Feng, Qian Bi, Zhen Zhang, Jincheng Hao, Yue |
Appeared in: |
Journal of electronic materials |
Paging: |
Volume 51 () nr. 6 pages 3342-3349 |
Year: |
2022-04-07 |
Contents: |
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Publisher: |
Springer US, New York |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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