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Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering |
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Titel: |
Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering |
Auteur: |
Katagiri, Atsuo Uehara, Mutsuo Kurokawa, Mao Akiyama, Kensuke Shimizu, Takao Matsushima, Masaaki Uchida, Hiroshi Kimura, Yoshisato Funakubo, Hiroshi |
Verschenen in: |
Journal of electronic materials |
Paginering: |
Jaargang 49 () nr. 12 pagina's 7509-7517 |
Jaar: |
2020-10-10 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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