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Journal description
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Details for article 14 of 78 found articles
| Title: |
Cu-Induced Dielectric Breakdown of Porous Low-Dielectric-Constant Film |
| Author: |
Cheng, Yi-Lung Lee, Chih-Yen Huang, Yao-Liang Sun, Chung-Ren Lee, Wen-Hsi Chen, Giin-Shan Fang, Jau-Shiung Phan, Bach Thang |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 46 (2017) nr. 6 pages 3627-3633 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 14 of 78 found articles
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