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Optical Properties of TiO2 Films Deposited by Reactive Electron Beam Sputtering |
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Title: |
Optical Properties of TiO2 Films Deposited by Reactive Electron Beam Sputtering |
Author: |
Kruchinin, V. N. Perevalov, T. V. Atuchin, V. V. Gritsenko, V. A. Komonov, A. I. Korolkov, I. V. Pokrovsky, L. D. Shih, Cheng Wei Chin, Albert |
Appeared in: |
Journal of electronic materials |
Paging: |
Volume 46 (2017) nr. 10 pages 6089-6095 |
Year: |
2017 |
Contents: |
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Publisher: |
Springer US, New York |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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