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Effects of Substrate and Post-Growth Treatments on the Microstructure and Properties of ZnO Thin Films Prepared by Atomic Layer Deposition |
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Titel: |
Effects of Substrate and Post-Growth Treatments on the Microstructure and Properties of ZnO Thin Films Prepared by Atomic Layer Deposition |
Auteur: |
Haseman, Micah Saadatkia, P. Winarski, D. J. Selim, F. A. Leedy, K. D. Tetlak, S. Look, D. C. Anwand, W. Wagner, A. |
Verschenen in: |
Journal of electronic materials |
Paginering: |
Jaargang 45 (2016) nr. 12 pagina's 6337-6345 |
Jaar: |
2016 |
Inhoud: |
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Uitgever: |
Springer US, New York |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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