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Characterization of Threading Dislocations in PVT-Grown AlN Substrates via x-Ray Topography and Ray Tracing Simulation |
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Titel: |
Characterization of Threading Dislocations in PVT-Grown AlN Substrates via x-Ray Topography and Ray Tracing Simulation |
Auteur: |
Zhou, Tianyi Raghothamachar, Balaji Wu, Fangzhen Dalmau, Rafael Moody, Baxter Craft, Spalding Schlesser, Raoul Dudley, Michael Sitar, Zlatko |
Verschenen in: |
Journal of electronic materials |
Paginering: |
Jaargang 43 (2014) nr. 4 pagina's 838-842 |
Jaar: |
2014 |
Inhoud: |
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Uitgever: |
Springer US, Boston |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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