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                                       Details for article 2 of 50 found articles
 
 
  Analysis of SiC Deposition Rate in a Tubular Hot-Wall Reactor with Polymeric Source Using the DoE Method
 
 
Title: Analysis of SiC Deposition Rate in a Tubular Hot-Wall Reactor with Polymeric Source Using the DoE Method
Author: Jamali Keikha, A.
Fanaei Sheikholeslami, T.
Behzadmehr, A.
Appeared in: Journal of electronic materials
Paging: Volume 42 (2013) nr. 6 pages 931-938
Year: 2013
Contents:
Publisher: Springer US, Boston
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 50 found articles
 
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