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Details for article 13 of 15 found articles
| Title: |
Preparation and Characterization of Ultralow-Dielectric-Constant Porous SiCOH Thin Films Using 1,2-Bis(triethoxysilyl)ethane, Triethoxymethylsilane, and a Copolymer Template |
| Author: |
Fu, Shuang Qian, Ke-Jia Ding, Shi-Jin Zhang, David Wei |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 40 (2011) nr. 10 pages 2139-2146 |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 15 found articles
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