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Journal description
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Details for article 34 of 35 found articles
| Title: |
Ti-Rich Barrier Layers Self-Formed on Porous Low-k Layers Using Cu(1 at.% Ti) Alloy Films |
| Author: |
Ito, Kazuhiro Kohama, Kazuyuki Tanaka, Tomohisa Mori, Kenichi Maekawa, Kazuyoshi Shirai, Yasuharu Murakami, Masanori |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 39 (2010) nr. 8 pages 1326-1333 |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 34 of 35 found articles
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