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Scanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures |
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Title: |
Scanning Ion Probe Studies of Silicon Implantation Profiles in AlGaN/GaN HEMT Heterostructures |
Author: |
Kocan, M. Umana-Membreno, G.A. Kilburn, M.R. Fletcher, I.R. Recht, F. McCarthy, L. Mishra, U.K. Nener, B.D. Parish, G. |
Appeared in: |
Journal of electronic materials |
Paging: |
Volume 37 (2007) nr. 5 pages 554-557 |
Year: |
2007 |
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Publisher: |
Springer US, Boston |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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