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Journal description
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Details for article 29 of 41 found articles
| Title: |
Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC |
| Author: |
VanMil, B.L. Lew, K.K. Myers-Ward, R.L. Eddy, C.R. Gaskill, D.K. |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 37 (2007) nr. 5 pages 685-690 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 41 found articles
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