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Journal description
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Details for article 23 of 26 found articles
| Title: |
The removal of deformed submicron particles from silicon wafers by spin rinse and megasonics |
| Author: |
Zhang, Fan Busnaina, Ahmed A. Fury, Michael A. Wang, Shi-Qing |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 29 () nr. 2 pages xx |
| Year: |
2000-04-03 |
| Contents: | |
| Publisher: |
Springer-Verlag, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 26 found articles
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