Control of the structure and surface morphology of gallium nitride and aluminum nitride thin films by nitrogen background pressure in pulsed laser deposition
Titel:
Control of the structure and surface morphology of gallium nitride and aluminum nitride thin films by nitrogen background pressure in pulsed laser deposition
Auteur:
Sudhir, G. S. Fujii, H. Wong, W. S. Kisielowski, C. Newman, N. Dieker, C. Liliental-Weber, Z. Rubin, M. D. Weber, E. R.