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Journal description
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Details for article 37 of 42 found articles
| Title: |
Rapid thermal annealing of ion implanted 6H-SiC by microwave processing |
| Author: |
Gardner, Jason A. Rao, Mulpuri V. Tian, Y. L. Holland, O. W. Roth, E. G. Chi, P. H. Ahmad, I. |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 26 (1997) nr. 3 pages 144-150 |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Springer-Verlag, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 37 of 42 found articles
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