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Journal description
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Details for article 169 of 224 found articles
| Title: |
Study by electron spectroscopy for chemical analysis of silicon, SiO2 and Si3N4 surfaces treated with various CF4-containing plasmas |
| Author: |
Licciardello, A. Pignataro, S. Pànczèl, M. |
| Appeared in: |
Surface technology |
| Paging: | Volume 18 (1983) nr. 3 pages 11 p. |
| Year: |
1983 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 169 of 224 found articles
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