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Journal description
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Details for article 5 of 8 found articles
| Title: |
Electron energy loss and Auger electron spectroscopy of ultrathin oxide films on silicon obtained in rf oxygen plasma |
| Author: |
Atanasova, E.D. Shopov, A.V. |
| Appeared in: |
Applications of surface science |
| Paging: | Volume 10 (1982) nr. 2 pages 18 p. |
| Year: |
1982 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 8 found articles
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