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                                       Details for article 5 of 15 found articles
 
 
  Determination of the etch rate of silicon in buffered HF using a 31Si tracer method
 
 
Title: Determination of the etch rate of silicon in buffered HF using a 31Si tracer method
Author: Hoffmeister, W.
Zügel, M.
Appeared in: The international journal of applied radiation and isotopes
Paging: Volume 20 (1969) nr. 2 pages 2 p.
Year: 1969
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 5 of 15 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands