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Journal description
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Details for article 6 of 30 found articles
| Title: |
An atomic force microscope-like dual-stage force controlled fast tool servo for in-process inspection of micro-structured surfaces |
| Author: |
Meng, Yixuan You, Zhichao Wang, Xiangyuan Zhu, Zhiwei Zhang, XinQuan Ren, Mingjun Zhu, LiMin |
| Appeared in: |
Mechanical systems and signal processing |
| Paging: | Volume 219 () nr. C pages p. |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 30 found articles
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