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Journal description
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Details for article 25 of 27 found articles
| Title: |
Sliding-mode control combined with improved adaptive feedforward for wafer scanner |
| Author: |
Li, Xiaojie Wang, Yiguang |
| Appeared in: |
Mechanical systems and signal processing |
| Paging: | Volume 103 (2018) nr. C pages 105-116 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 25 of 27 found articles
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