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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 9 of 17 found articles
| Title: |
Experimental study of copper leveling additives and their wafer and pattern-scale effect on copper planarization |
| Author: |
Kelly, James Surisetty, Charan Canaperi, Donald |
| Appeared in: |
Comptes rendus chimie |
| Paging: | Volume 16 (2013) nr. 1 pages 6 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Académie des sciences |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 9 of 17 found articles
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