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  Analysis of resin flow during nano-imprinting lithographic process
 
 
Title: Analysis of resin flow during nano-imprinting lithographic process
Author: Kang, J.H.
Kim, S.M.
Woo, Y.S.
Lee, W.I.
Appeared in: Current applied physics
Paging: Volume 8 (2008) nr. 6 pages 8 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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