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Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition |
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Titel: |
Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition |
Auteur: |
Li, Xing Lu, Hong-Liang Ma, Hong-Ping Yang, Jian-Guo Chen, Jin-Xin Huang, Wei Guo, Qixin Feng, Ji-Jun Zhang, David Wei |
Verschenen in: |
Current applied physics |
Paginering: |
Jaargang 19 (2019) nr. 2 pagina's 72-81 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Korean Physical Society |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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