Application of rapid thermal process to solution-processed Ti-silicate films for enhancing permittivity without losing amorphous nature
Titel:
Application of rapid thermal process to solution-processed Ti-silicate films for enhancing permittivity without losing amorphous nature
Auteur:
Lee, Seung Muk Hwang, Soo Min Hwang, Soon Yong Kim, Tae Woong Choi, Ju Yun Park, Joong Keun Kim, Tae Jung Kim, Young Dong Kim, Hyoungsub Lim, Jun Hyung Joo, Jinho