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Journal description
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Details for article 38 of 40 found articles
| Title: |
Thermal stability of RuO2 thin films prepared by modified atomic layer deposition |
| Author: |
Kim, Jin-Hyock Ahn, Ji-Hoon Kang, Sang-Won Roh, Jae-Sung Kwon, Se-Hun Kim, Ja-Yong |
| Appeared in: |
Current applied physics |
| Paging: | Volume 12 (2012) nr. S2 pages 4 p. |
| Year: |
2012 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 38 of 40 found articles
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