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Journal description
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Details for article 38 of 50 found articles
| Title: |
Radio frequency source power-induced ion energy impact on SiN films deposited by using a pulsed-PECVD in SiH4–N2 plasma at room temperature |
| Author: |
Lee, Hwajune Kim, Byungwhan Kwon, Sanghee |
| Appeared in: |
Current applied physics |
| Paging: | Volume 10 (2010) nr. 3 pages 4 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 38 of 50 found articles
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