Effects of O2 plasma pre-treatment on ZnO thin films grown on polyethersulfone substrates at various deposition temperatures by atomic layer deposition
Titel:
Effects of O2 plasma pre-treatment on ZnO thin films grown on polyethersulfone substrates at various deposition temperatures by atomic layer deposition
Auteur:
Lee, J.Y. Shin, C.M. Heo, J.H. Kim, C.R. Park, J.H. Lee, T.M. Ryu, H. Son, C.S. Shin, B.C. Lee, W.J.