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                                       Details for article 13 of 61 found articles
 
 
  Elimination of silicon hillocks using an alkaline complexant etching system
 
 
Title: Elimination of silicon hillocks using an alkaline complexant etching system
Author: Moldovan, Carmen
Iosub, Rodica
Modreanu, Mircea
Appeared in: International journal of inorganic materials
Paging: Volume 3 (2001) nr. 8 pages 1173-1176
Year: 2001
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 61 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands