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  Antimony dopant redistribution during copper silicide formation
 
 
Title: Antimony dopant redistribution during copper silicide formation
Author: Benkerri, M
Halimi, R
Bouabellou, A
Mosser, A
Sens, J.P
Appeared in: International journal of inorganic materials
Paging: Volume 3 (2001) nr. 8 pages 1299-1301
Year: 2001
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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