3D patterning of silicon by contact etching with anodically biased nanoporous gold electrodes
Titel:
3D patterning of silicon by contact etching with anodically biased nanoporous gold electrodes
Auteur:
Torralba, Encarnación Halbwax, Mathieu El Assimi, Taha Fouchier, Marin Magnin, Vincent Harari, Joseph Vilcot, Jean-Pierre Le Gall, Sylvain Lachaume, Raphaël Cachet-Vivier, Christine Bastide, Stéphane