A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)
Titel:
A miniature electron ionization source fabricated using microelectromechanical systems (MEMS) with integrated carbon nanotube (CNT) field emission cathodes and low-temperature co-fired ceramics (LTCC)
Auteur:
Radauscher, Erich J. Parker, Charles B. Gilchrist, Kristin H. Di Dona, Shane Russell, Zachary E. Hall, Stephen D. Carlson, James B. Grego, Sonia Edwards, Steven J. Sperline, Roger P. Denton, M. Bonner Stoner, Brian R. Glass, Jeffrey T. Amsden, Jason J.