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High crystal quality strained Si0.5Ge0.5 layer with a thickness of up to 50 nm grown on the three-layer SiGe strain relaxed buffer |
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Titel: |
High crystal quality strained Si0.5Ge0.5 layer with a thickness of up to 50 nm grown on the three-layer SiGe strain relaxed buffer |
Auteur: |
Zhao, Zhiqian Li, Yongliang Gu, Shihai Zhang, Qingzhu Wang, Guilei Li, Junjie Li, Yan Xu, Gaobo Ma, Xueli Wang, Xiaolei Yang, Hong Luo, Jun Li, JunFeng Yin, Huaxiang Wang, Wenwu |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 99 (2019) nr. C pagina's 159-164 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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