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Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC |
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Titel: |
Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC |
Auteur: |
RascunĂ , S. BadalĂ , P. Tringali, C. Bongiorno, C. Smecca, E. Alberti, A. Di Franco, S. Giannazzo, F. Greco, G. Roccaforte, F. Saggio, M. |
Verschenen in: |
Materials science in semiconductor processing |
Paginering: |
Jaargang 97 (2019) nr. C pagina's 62-66 |
Jaar: |
2019 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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