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Journal description
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Details for article 31 of 39 found articles
| Title: |
Preparation of photosensitive polyimides (PSPIs) and their feasible evaluation for lithographic insulation patterns (LIPs) of integrated circuits (ICs) without negative photoresists |
| Author: |
Chen, Meng-Hsin Lai, Chiu-Chun Chen, Hsin-Lung Lin, Yi-Hung Huang, Kuan-Yeh Lin, Chih-Hsiang Hsiao, Ho-Ting Liu, Lung-Chang Chen, Chien-Ming |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 88 () nr. C pages 132-138 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 39 found articles
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