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Journal description
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Details for article 3 of 19 found articles
| Title: |
Characterization of recrystallized depth and dopant distribution in laser recovery of grinding damage in single-crystal silicon |
| Author: |
Niitsu, Keiichiro Tayama, Yu Kato, Taketoshi Maehara, Hidenobu Yan, Jiwang |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 82 () nr. C pages 54-61 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 19 found articles
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