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Journal description
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Details for article 3 of 8 found articles
| Title: |
Corrigendum to ‘‘Changes in elastic deformation of strained si by microfabrication’’ |
| Author: |
Arimoto, Keisuke Furukawa, Daisuke Yamanaka, Junji Nakagawa, Kiyokazu Sawano, Kentarou Koh, Shinji Shiraki, Yasuhiro Usami, Noritaka |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 8 (2005) nr. 6 pages 1 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 3 of 8 found articles
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