|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 6 of 17 found articles
| Title: |
Improvement of gate CD imbalance for a 0.35μm logic technology |
| Author: |
Joung, Yang Hee Mun, Seong Yeol Kang, Seong Jun |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 7 (2004) nr. 1-2 pages 4 p. |
| Year: |
2004 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 17 found articles
| << previous | next >> |