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Journal description
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Details for article 11 of 12 found articles
| Title: |
Simultaneous DualEELS and EDS analysis across the ohmic contact region in 3D NAND storage and FinFET electronic devices |
| Author: |
Longo, P. Zhang, H. Twesten, R.D. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 65 (2017) nr. C pages 44-48 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 12 found articles
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