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                                       Details for article 29 of 42 found articles
 
 
  Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications
 
 
Title: Piezoelectric and electrical properties of PZT-PSN thin film ceramics for MEMS applications
Author: Kim, Seong Kon
Kim, Cheol-Su
Lee, Kyung Wha
Lee, Sang Yeol
Appeared in: Materials science in semiconductor processing
Paging: Volume 5 (2002) nr. 2-3 pages 7 p.
Year: 2002
Contents:
Publisher: Elsevier Science Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 29 of 42 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands