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Journal description
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Details for article 19 of 42 found articles
| Title: |
Homogeneous and heterogeneous reactions in the decomposition of precursors for the MOCVD of high-k and ferroelectric films |
| Author: |
Condorelli, G.G. Baeri, A. Fragalà, I.L. Lauretta, V. Smerlo, G. |
| Appeared in: |
Materials science in semiconductor processing |
| Paging: | Volume 5 (2002) nr. 2-3 pages 5 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 19 of 42 found articles
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